• (Hard) X-ray photoelectron spectroscopy (HAXPES, XPS)

• Time-of-flight secondary ion mass spectrometry (ToF-SIMS)

• Ellipsometry

• Analytical scanning electron microscopy (SEM)

• Energy dispersive X-ray spectroscopy (EDS)

• Transmission scanning electron microscopy (T-SEM)

• Auger electron microscopy (SAM)

• X-ray absorption spectroscopy (XAS, NEXAFS)

• Infrared spectroscopy and microscopy

• White light interference microscopy

• Coating technologies: electron beam evaporation and magnetron sputtering, plasma CVD

further information