Angle dependent reflexion maxima can be measured, if surfaces of crystalline materials are irradiated by a fine X-ray beam. These diffraction interferences, resulting from different crystal lattice distances, characteristic for each crystallographic phase of a material (XRD). By using a data base non-destructive material analysis is possible.
A grazing incidence of the X-ray beam onto the surface results in an analysis of the outermost surface or thin layers (< 1 micrometer, GIXRD).
Lowering the incident angle below the total reflexion of X-rays (XRR), the density of surface material, and using the resulting interferences at phase boundaries, the thickness of layers can be measured.
| Instruments | XRD 3000 TT, XRD 7 (Seifert-FPM) |
|---|---|
| Measured area (typical) |
XRD: 2 mm x 12 mm (GIXRD:
10 mm x 12 mm) XRR: 40 mm x 12 mm |
| Sample size | Max. 100 mm x 100 mm (by modification 200 mm x 200
mm) height 4 mm bzw. 25 mm |
| Conditions | Copper anode (long fine focus) up to 2200 W, measuring circle radius from 170 mm to 300 mm |
| Information depth | XRD: ca. 1 µm to 50 µm (GIXRD: ca. 0,05 µm to 2 µm) |
| Thickness measurement |
XRR: range ca. 1 nm up to 300 nm Resolution < 0,1 nm (only smooth subtrates/layers) |
Division 6.4 | Working group Thin Film Technologies...
Testing devices of the working group | BAM Testing devices
Dipl.-Ing. (FH)
