The short coherence length of white light can be used to measure the distances of surface topography by interference, contactless and with high depth resolution.
The combination of several white light interference objectives with an atomic force probe in one turret enables roughness measurements on large areas as well as highly resolved measurements. Quick changes from different optical magnifications to the AFM are feasible with high positioning precision. The method is well calibrated using several step height standards (reference procedure).
| Instrument | Multi probe set-up NewView 5022 (Zygo LOT) |
|---|---|
| Scan range | (50 x 70) µm² to (5 x 7) mm² |
| Resolution WLIM | 0,5 µm laterally, height 1nm |
| Resolution AFM | 10 nm laterally, height 0,1nm |
| Sample size | Diameter 150 µm ,height 30 mm |
| Specifics | Measurement with an optical height resolution of some nanometer all along the whole scan range of 150 µm (very large range for that step height!) |
Video on white light interference microscopy: „One Picture is Worth Ten Thousand Words“ (in German)
Division 6.4 | Working group Thin Film Technologies...
Testing devices of the working group | Testing devices of the BAM
Dipl.-Ing. (FH)
