Light microscopes with maximum optical resolution and for stereoscopic imaging are used for inspection and documentation by means of high resolution digital photography.
Thickness measurements on layer systems can be carried out after metallographic preparation of cross-sections, inclined cross-sections or calotte grinding using a calibrated monitor (display based) measuring system. Thicknesses below 1 micrometer are measured by a scanning electron microscope.
Angled polish at a multiple layered coating for thickness measurement, magnification 200-fold (large image)
| Instrument |
Metal microscope
Polyvar MET (Reichert-Jung) |
Stereo microscope
MZ 16 (Leica) |
|---|---|---|
| Magnification | 16-fold to 2000-fold | 7-fold to 115-fold |
| Resolution | 0,4 µm | 1,2 µm |
| Field of view | 15 mm to 0,12 mm | 30 mm to 1,8 mm |
| Working distance | 5,3 mm to 0,12 mm | 55 mm |
Division 6.4 | Working group Thin Film Technology...
Testing devices of the Working group | BAM Testing devices
Michaela Lagleder
